Performance Assessment of Parylene-Based MEMS Gas Sensors

Abstract

The performance of parylene E as a VOC sensing material has been benchmarked through a series of measurement of the dynamic/equilibrium capacitance responses in fringe-field type chemicapacitive sensors. The capacitance change over toluene and ethanol vapor has been obtained for different concentrations and different polymers. It is shown that parylene E has a unique gas-sensing nature with a high sensitivity to non-polar VOC and a high selectivity against polar VOC.