高分子ナノシートを用いた貼付型ナノスケール熱伝導率計測デバイス

抄録

We proposed thermal conductivity measurement device which can measured nano, micro scale materials by extending 3-omega method. Specifically, we fabricated metal micro wire on an elastomeric ultra-thin film (nanosheet) with the thickness of several hundred nanometers by using photolithography or metal mask. Electrical resistivity of the fabricated metal micro wire by using photolithography and metal mask were 25.5 ohm and 364 ohm, respectively. Furthermore, we confirmed that the electrical resistivity of metal micro wire formed on the elastomeric nanosheet was not changed even if the nanosheet was peeled off from a supporting layer, resulting in a free-standing state. The result suggested that fabricated device can measure thermal conductivity by attaching measurement sample.