Fabrication and evaluation of titanium alloy scalpel by Thermally assisted Reactive Ion Etching method

Abstract

In this study, we report the fabrication procedure and evaluation of titanium alloy scalpels for microsurgery. The scalpels with micro-scale feature were fabricated by Thermally assisted Reactive Ion Etching (TRIE) technique. We evaluated the scalpels with/without micro-scale feature and confirmed these scalpels with micro-scale feature can cut PDMS with low cutting resistance.