Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : November 19, 2019 - November 21, 2019
We have developed a small vibration energy harvester (VEH). Our developed VEH uses an electret which can keep constant its surface potential. However, when the surface potential is too high, the movable electrode is adhered to the electret on the fixed electrode by electrostatic attraction and power generation is inhibited. To solve this problem, an array of dots on a nanometer scale was applied to the electret surface. As a result, three advantages of reduction of electret adhesion force, improvement of surface potential, improvement of electric power generation were obtained. Our developed VEH generated the electric power of 26.7 μW for the vibration of acceleration of 0.2 g at 17.5 Hz, when the SiO2 electret with the nano-dots array (dot width and pitch are 0.75 μm and 2.0 μm, respectively) was employed.
