抄録
We present design of V-beam type on-chip probe of which displacement is enlarged in a microfluidic chip for cell mechanical property measurement. In order to actuate on-chip probe with high-accuracy, we deformed the microfluidic chip by piezoelectric actuators. The displacement of the piezoelectric actuators is enlarged by the V beam structure in the chip. Firstly, we designed V-beam and fabricated microfluidic chip having V-beam. Secondly, position accuracy of the fabricated V-beam type on-chip probe was measured. The probe was actuated from 0 μm to 93.3 μm with high linearity. Finally, we measured reaction force of oocyte and calculated the young's modulus of zona pellucida by using Hertz contact theory. We applied reaction force of oocyte up to 9 μN, and Young's modulus of zona pellucida was measured 1.09 kPa.
