回転対称のスパイラル管路とMEMS差圧センサを用いた二軸角加速度センサ

抄録

This paper describes a biaxial angular acceleration sensor utilizing the inertial force in spiral channels and MEMS (Micro Electro Mechanical Systems) differential pressure sensors. The sensor unit of the proposed device consists of two rotational-symmetric spiral channels and piezoresistive cantilevers. When angular acceleration is applied, inertial force is generated in the fluid inside the spiral channel. This inertial force deforms the cantilever, causing the resistance change. Therefore, the applied angular acceleration can be calculated from the resistance change. Also, the rotational-symmetric spiral channels cancel the non-target axis sensitivity. By placing two such sensor units at orthogonally, angular acceleration can be measured simultaneously in biaxial axes. Our proposed device responded with almost constant sensitivity from 1 to 15 Hz, and the non-target axis sensitivity was approximately 1/300 of the target axis sensitivity.