カンチレバー触覚センサの作製歩留まり向上と個体差低減のための接触部固定法および応力層形成法

抄録

In this study, the fabrication process of the developed cantilever-based MEMS tactile sensor has been improved to increase the yield and reduce the individual differences while maintaining the force sensitivity. The bonding area between the PDMS thin layer embedding cantilever on the sensor chip and the PDMS bump as the contact point is increased and the bump is fixed using the self-adhesive property of the PDMS. As a result, the accuracy of the alignment and the reproducibility of the sensor response are improved. In addition, it is demonstrated that the fabrication process can be shortened by devising a method of forming the stress layer to generate initial deflection in the cantilevers.