汎用型空気圧シリンダのナノメートルオーダー位置決め

抄録

Pneumatic cylinders have several advantageous for industrial applications: no heat generation even after repeat operation, which is serious issue in the electric motors, and high power/weight ratio, low-cost of implementation. However, they have been considered unsuitable for high-precision positioning control since they are easily affected by frictional forces due to the servo compliance resulted from air compressibility. Ultra-high-precision positioning technology has a possibility to make pneumatic actuators be widely applied in the precision work, which lead to a breakthrough in the industrial world. In this study, we propose a positioning control method for nanometer-order positioning technology using a practical general-purpose pneumatic cylinder sealed with an ordinary rubber packing.