Abstract
Fatigue properties of 100 nm thickness-DLC and CNx coatings which were made under different coating conditions were evaluated with an AFM micro-fatigue test which was developed by authors. Higher ion energy of assisted ion as Ar and N for DLC and CNx respectively provided smaller hardness and shorter life. When assisted ion energy is relatively high, the depth of delamination wear scar is equal to the depth of maximum tangential stress. However, when assisted ion energy is relatively small, the depth of delamination wear scar is different from the depth of maximum tangential stress.
