The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2005.54
Session ID : 508
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508 Application of Thermal Nonequilibrium Condition Using Discharge Plasma to Synthesis Process of Materials
Nobuaki KANBE, Kazuhiro ISHIMARU
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Keywords: Thermal Nonequilibrium Condition, DC Discharge Plasma, Carbon Materials, CVD
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© 2005 The Japan Society of Mechanical Engineers
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