Low-Temperature Growth of GaAs by Organometallic Vapor Phase Epitaxy Using TEGa and TBAs

Abstract

GaAs epitaxial layers were grown by organometallic vapor phase epitaxy (OMVPE) using TEGa and TBAs over a wide range of growth temperature (350°C-700°C) and V/III ratio (2-9). GaAs with excellent surface morphology was obtained when the growth temperature was higher than 600°C. The GaAs surface tended to be rough with decreasing growth temperature below 550°C. When the growth temperature was decreased to 400°C, p-type GaAs was obtained with specular surface. The hole concentration increased with decreasing V/III ratio. The hole concentration was as high as 5.5×10¹⁷ cm^–3 for the sample grown at 400°C with V/III ratio = 2.