材料
Online ISSN : 1880-7488
Print ISSN : 0514-5163
ISSN-L : 0514-5163
ポリシャの粘弾性挙動
黒部 利次西川 勝信高山 昌也
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1989 年 38 巻 434 号 p. 1346-1352

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A vesicant polyurethane sheet is widely used for polishing silicon wafers and glass parts. It is believed that the visco-elastic property of vesicant polyurethane sheet and the geometrical form of vesicant layer may have a great influence on the polishing characteristics of workpiece. The present study was focused both on the development of a visco-elasticity measuring setup and on the measurements of visco-elastic property of surface layer in vesicant polyurethane polisher subjected to creep loading. It was found from the experiments that the newly-developed setup was suitable to measure the visco-elastic property of polishers and that the deformation of surface layer of polisher depended on the applied load. The deformation of polisher associated with loading in wet environment was greater than that in dry one.

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