進行波を利用した新しい非接触流体軸受の提案

抄録

A new non-contact fluid bearing, which utilizes traveling waves, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the waves traveling radially on the bearing surface. Conventional hydrostatic bearings utilize externally compressed fluid, which requires plumbing and large facilities. The proposed bearing realizes non-contact precision motion without those facilities, and furthermore it has a capability to electrically control the bearing force or clearance. A prototype air bearing was developed on the basis of the proposed principle by utilizing piezo-electric actuators. Its non-contact smooth motion was confirmed, and its basic performance is clarified experimentally in terms of stiffness, bearing clearance, load capacity, pressure distribution of the air film, etc.