ミクロ反応場の生成と応用 -マイクロプラズマ研究の現状と将来展望- 3.マイクロプラズマの計測•解析

抄録

Properties of microplasmas can be characterized not only by their small sizes from mm to μm but also by their relatively high plasma densities which range over 10¹³ cm^-3 in collision dominant atmospheres. These features are due to the high operating pressure generally used, in accordance with Paschen’s law. In addition, the plasma-wall interaction becomes important, given that the charges accumulated on the surface can strongly affect the discharge and plasma behaviors. Diagnostics and simulations should aim to clarify those specific properties of microplasmas. Although there are many difficulties inherent in measurements in such small spaces, several methods have been developed by using optical absorption, fluorescence, and scattering techniques by using various lasers as the light sources. For the simulation, in most cases fluid, particle and Vlasov models can be applied to microplasmas operating at higher pressure. The computer simulations are performed to investigate and produced microplasmas. In this chapter, an overview of our studies on the diagnostics and simulations, mentioned above, will be introduced.