80 巻 (2004) 10 号 p. 845-853
In addition to generation and diagnostics of microplasma, application studies of microplasmas have been performed intensively. Based on the unique characteristics of microplasmas, such as an extraordinary locality and high density, developments of various new application technologies are in progress. Those include, e.g., novel materials processing, biomaterials treatment, chemical analysis, light sources of ultra-short wavelengths, three-dimensional micromachining tools and other functional plasma devices. In this chapter, an overview of our studies mentioned above on the applications will be introduced.