プラズマ・核融合学会誌
小特集 「ミクロ反応場の生成と応用 -マイクロプラズマ研究の現状と将来展望-」
ミクロ反応場の生成と応用 -マイクロプラズマ研究の現状と将来展望- 4.マイクロプラズマの応用
寺嶋 和夫伊藤 剛仁藤原 秀行片平 研河野 明廣王 剣亮荒巻 光利一木 隆範
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80 巻 (2004) 10 号 p. 845-853

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In addition to generation and diagnostics of microplasma, application studies of microplasmas have been performed intensively. Based on the unique characteristics of microplasmas, such as an extraordinary locality and high density, developments of various new application technologies are in progress. Those include, e.g., novel materials processing, biomaterials treatment, chemical analysis, light sources of ultra-short wavelengths, three-dimensional micromachining tools and other functional plasma devices. In this chapter, an overview of our studies mentioned above on the applications will be introduced.

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© 2004 by The Japan Society of Plasma Science and Nuclear Fusion Research (Japanese)
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