スマートプロセス学会誌
Online ISSN : 2187-1337
Print ISSN : 2186-702X
ISSN-L : 2186-702X
高圧粉末圧縮法によるCu-SnAgCu成形シートを用いた液相拡散接合層の信頼性評価
坂本 一三巽 裕章西川 宏
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2025 年 14 巻 6 号 p. 301-308

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 Amid growing concerns over energy consumption and environmental sustainability, power semiconductor devices have emerged as a highly efficient technology for electrical energy conversion. Operating in high-temperature environments (typically between 200 and 300℃), these devices experience significant thermal stress due to frequent switching operations. To overcome these challenges, we developed a Cu-SnAgCu (SAC) molded sheet using a high-pressure powder compression method that leverages the plastic flow of SAC particles. This die attach material is engineered to withstand demanding thermal conditions. This Cu-SAC molded sheets can be fabricated to a thickness of 40μm without voids. Additionally, the bonded layer maintained its strength after a 1000-hour heat resistance test at 300℃, and no cracks were observed in the SiC die following a -40/+175℃ thermal cycle test for 1000 cycles. Moreover, our results indicate that incorporating a high Cu content in the bonded layer enhances both the coefficient of thermal expansion and the elastic modulus of conventional Cu3Sn, aligning these properties more closely with those of pure Cu. Moreover, our results indicate that incorporating a high Cu content in the bonded layer enhances the elastic modulus of conventional Cu3Sn, aligning these properties more closely with those of pure Cu. These effects and fewer voids are considered that the bonded layer contributed to the reliability of the joint.
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