2001 年 22 巻 10 号 p. 679-686
Performance of a soft X-ray emission spectrometer employing a thinned back-illuminated CCD detector and a Rowland circle of 1 m in radius was examined in the energy range of 58–1254 eV. The K and L emission spectra of metal oxides, graphite, silicon compounds etc. stimulated by a low-energy electron were in good agreement with those obtained in the previous observations with conventional MCP detectors. The examinations suggested that well-resolved spectra can be obtained by several-ten second measurements when the distance between an optical source-point (sample) and grating is 7–8 cm.