2001 年 22 巻 4 号 p. 261-268
The beamline named ‘SORIS’ was constructed at Ritsumeikan SR Center for studying surface and interface structures by photoelectron spectroscopy (PES) and medium energy ion scattering (MEIS). The former provides the information about the electronic structures and the latter makes it possible to determine the atomic configurations of surfaces and interfaces. Two types of varied-space-plane gratings monochromate SR-light in the energy range from 5 up to 700 eV and photoelectrons are detected by a hemispherical energy analyzer with a radius of 139.7 mm. A new toroidal electrostatic analyzer designed and constructed for MEIS has achieved an excellent energy resolution of ΔE/E = 9×10−4 and thus allows a layer-by-layer analysis. Samples are prepared by molecular beam epitaxy with three Knudesn cells. In addition, clean surfaces can be oxidized by using an infrared heating system. The analyses are performed in situ without exposing samples to the air. As typical applications, we show the structural analysis of TiO2-terminated SrTiO3(001) surfaces and the initial oxidation process for the Si(111)-7×7 surface.