特集：低エネルギー電子顕微鏡/光電子顕微鏡の開発と応用
LEEMによるSi(111)およびH/Si(111)上のCuナノ構造形成過程の動的観察と構造解析
2002 年 23 巻 5 号 p. 271-276
詳細
2002 年 23 巻 5 号 p. 271-276
The growth processes of Cu nano-structure on hydrogen terminated Si(111) surfaces were investigated by low energy electron microscopy (LEEM). The structure analysis of the Cu nano-structure was also carried out by low energy electron diffraction (LEED) using a LEEM apparatus. Cu nano-structures grow preferentially at step edges and domain boundaries. LEED patterns observed in LEEM show a different dependence on electron energies observed by using the conventional grid-type LEED optics. Taking this difference into consideration, we carried out a structure analysis of Cu nano-structures. It is shown that the Cu nano-structure is a β-phase Cu-Si alloy structure, and has {554} and {15 16 13} facets.
