RHEEDによるGaAs表面構造の研究

抄録

Rocking-curve analysis of reflection high-energy electron diffraction (RHEED) based on dynamical diffraction theory is a powerful method to study atomic structures of solid surfaces. Also, the grazing-angle geometry of the RHEED electron gun makes itself suitable for in-situ monitoring of molecular-beam epitaxy (MBE). This is of great advantage in evaluating the real surface structure of GaAs using RHEED rocking-curve analysis, because the experimental data can be analyzed without considering the effect of the adsorption and/or desorption of As, which might occur while the sample is transferred from an MBE chamber. This paper briefly reviews recent RHEED studies on the atomic structures of GaAs(001) surfaces. Results for the As-stabilized c(4×4) and Ga-stabilized c(8×2) surfaces, and the adsorption structure of Zn on the (2×4) surface are presented.