試料の取り扱い，データ処理法とその利用方法

抄録

ISOTC (Technical Committee) 201 was organized in 1992 to establish the International Standard on surface analysis methods such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS), Secondary Ion Mass Spectrometry (SIMS), Glow Discharge Optical Emission Spectroscopy (GDOES) and Total Reflection X-ray fluorescence Spectroscopy (TXRF). ISO TC 201 on Surface Chemical Analysis consists of eight Sub-Committees and one Working Group (WG) at present. The activities of Sub-Committee 2 (SC 2) and Sub-Committee 3 (SC 3) are deliberation and establishment of the International Standard on General Procedure, and Data Management and Treatment, respectively. “ISO 14976: Surface chemical analysis—Data transfer format” was enacted as the International Standard in 1998, “ISO 14975: Surface chemical analysis—Information formats” was in 2000. These two standards were discussed in SC 3. Specimen handling, reference materials and reporting data have been on the table in SC 2 but International Standard has not yet been adopted. ISO 14976 and ISO 14975 were translated into Japanese to be adapted in JIS. In this report the two International Standards are explained and the trend of standardization in SC 2 and SC 3 as well as practical use of International Standard is briefly touched.