SIトレーサブルな電子分光法；CMAを例として

抄録

We have developed an electron spectroscopy which will be SI traceable. Recent achievements for this spectroscopy are presented; the transmission and energy calibrations for our novel cylindrical Auger electron analyzer. The transmission was observed by using a well defined mini-electron gun as a virtual electron source at the sample position and two Faraday cups just before the input mesh and the final Auger electron detector measured the electron currents. The ratio of the two currents gave the transmission. Meshes used in the CMA showed a lens effect of both plus and minus features, and also played as an electron scattering object. In the energy calibration, the primary electron has been used as a reference energy in which the acceleration voltage is SI traceable, thus the peak positions of the thermal electrons emitted from the electron source were simulated by PC. The simulation revealed the shift of the peak position of the thermal electrons. Electronics for the current and voltage measurements were also developed, particularly a metrological high voltage divider was valuable.