表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
論文
マグネトロンスパッタ法により作製した新規Mg(OH)2-C透明導電材料
本城 貴充千葉 雅史信木 関久慈 俊郎
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2008 年 29 巻 9 号 p. 532-536

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It is well known that transparent conductive materials are key materials for FPD (Flat Panel Display). A practical transparent conductive material is indium tin oxide (ITO) consisting of indium oxide and tin oxide. However, indium price has increased over the last several years because indium is a rare metal with 0.00001 of Clarke number. Therefore searching alternative transparent conductive materials rather than indium has been very active over the last decades. In this study, rf-magnetron sputtering method is used. Magnesium and graphite target are co-sputtered and Mg-C films were formed. Then, Mg-C film became transparent after being left in moistured air for 10−15 min. Transmittance of 90% in average in the range of wavelength of 380−1000nm. Resistivity of 10−1 Ωcm was observed. In this work it will be demonstrated that black Mg-C non-equilibrium films that became consequently were transparent with electric resistively after exposing in the air.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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