触媒CVD法によるカーボンナノウォール成長

抄録

Carbon nanowall(CNW) is a carbon nanomaterial that has a wall structure consisting of graphite, which stands on a substrate. Owing to this structure, the CNW shows interesting characteristics such as a large surface area and a high aspect ratio. Therefore, CNW is expected to be used as capacitor electrodes and electron field emitters. Catalytic chemical vapor deposition(Cat-CVD) has advantages including the use of convenient and low-cost equipment and the high decomposition rate of the source gas. This method has been used in the deposition of diamond, silicon films and carbon nanotubes. We used this method for the deposition of CNWs. In this paper, I present the preparation of CNWs by Cat-CVD including discuss of the growth of CNWs.