表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
特集:水の表面化学 —水を操る—
徹底的にpureな水—超純水
山中 弘次
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2014 年 35 巻 9 号 p. 504-509

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The definition, property, application fields and purification facilities of ultra pure water are overviewed with the recent achievements in the technologies of water recycling and reductions in chemical consumption at first. Then the ion adsorption filter for removing ppt level of ionic impurities from ultra pure water, and the functionalized ultra pure water for precision cleaning in the fields of semiconductor and flat panel displays are described as the recent achievements in ultra pure water technology.

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