雰囲気光電子分光の現状と展望

抄録

X-ray Photoelectron Spectroscopy (XPS) is a powerful tool for direct observation of chemical state of materials. Various kinds of instruments that are optimized for high energy resolution, high angular resolution, or high spatial resolution are developed and are used according to each applications. In general, XPS measurements are performed with the condition of high or ultra-high vacuum due to the attenuation length of X-ray and photoelectrons. At higher pressure, there is also a difficulty to apply high voltage to the XPS analyzer. On the other hand, demands for in-situ measurement are increasing. We have developed instruments for Near Ambient Pressure X-ray Photoelectron Spectroscopy (NAP-XPS) recently and some of them are already used at several institutes. Latest results and the future prospect of NAP-XPS are described in this article.