抄録
A study has been made of mechanical and electrochemical properties of carbon films on pure iron sheets formed by ion beam enhanced deposition (IBED). The IBED carbon film was formed by implantation of 100 keV-12C+ ions up to a dose of 1018 ions/cm2 in a fluorocarbon atomosphere. The results showed an increase in surface hardness, and distinct reductions in friction coefficient, wear volume and anodic dissolution of iron. The mechanical and electrochemical properties are discussed with respect to the composition and structure analyzed by XPS, XRD and laser Raman spectroscopy. In conclusion, IBED with C+ beam in fluorocarbon atomosphere is a useful technique for formation of the solid lubricating carbon film with high durability.
