スプレー熱分解法による有機スズ化倉物からの酸化スズ膜の成長

抄録

Growth of tin oxide films on glass substrates from the solution of several organotin compounds, (C₄H₉)₄Sn, (C₄H₉)₃SnOOCCH₃, (C₄H₉)₂Sn(OOCCH₃)₂, (C₄H₉)₃SnCl and (C₄H₉)₂SnCl₂, by spray pyrolysis has been found to be possible. Of these compounds, only the crystallinity of the tin oxide film grown from (C₄H₉)₂SnCl₂ was affected by annealing at 600°C after being prepared at 400°C. The texture coefficient of the tin oxide films determined from XRD profiles showed that preferred orientation of the films were different depending on the source compounds. The crystallite size of the tin oxide films was also discussed in terms of the growth parameters. Furthermore, it has been proved that the films grown from the Cl-free compounds were of smooth surfaces.