A New and Practical Energy Calibration Method Using Spectrometer Offset Function in Auger Electron Spectroscopy

Daisuke FUJITA; Kazuhiro YOSHIHARA

doi:10.1380/jsssj.14.429

スペクトロメーターオフセット関数によるオージェ電子分光法における簡易エネルギー軸較正方法

藤田大介, 吉原一紘

著者情報

ジャーナルフリー

1993 年 14 巻 7 号 p. 429-435

DOI https://doi.org/10.1380/jsssj.14.429

詳細

発行日: 1993/09/10 受付日: 1993/04/15 J-STAGE公開日: 2009/08/07 受理日: 1993/05/20 早期公開日: - 改訂日: -
訂正情報
訂正日: 2009/08/07 訂正理由: - 訂正箇所: 論文抄録訂正内容: Wrong : A practical and simple calibration procedure for determining the energy scale in Auger electron spectroscopy (AES) by using a newly developed idea of a spectrometer offset function is proposed here. This method enables transformation of the uncalibrated energy scale to be the calibrated and Fermi-level-referenced ones. The reliability of the calibrated energy scale can be estimated by the standard error of least-square fitting of the spectrometer offset function to the experimental values. A round-robin test involving the different kinds of twelve spectrometers has been conducted to clarify the effectiveness of this calibration method. Compared with the Fermi-level-referenced kinetic energies of Ni L₃VV and M₃VV, the scatter of these calibration-corrected peak positions is found to be very low, amounting to 20&sim;30% of the scatter of uncorrected values. It is also found that the spectrometers with the higher energy resolution tend to have the lower standard errors. These results clearly suggest that this procedure is very useful for the practical calibration of AES energy scale.
Right : A practical and simple calibration procedure for determining the energy scale in Auger electron spectroscopy (AES) by using a newly developed idea of a spectrometer offset function is proposed here. This method enables transformation of the uncalibrated energy scale to be the calibrated and Fermi-level-referenced ones. The reliability of the calibrated energy scale can be estimated by the standard error of least-square fitting of the spectrometer offset function to the experimental values. A round-robin test involving the different kinds of twelve spectrometers has been conducted to clarify the effectiveness of this calibration method. Compared with the Fermi-level-referenced kinetic energies of Ni L₃VV and M₃VV, the scatter of these calibration-corrected peak positions is found to be very low, amounting to 20∼30% of the scatter of uncorrected values. It is also found that the spectrometers with the higher energy resolution tend to have the lower standard errors. These results clearly suggest that this procedure is very useful for the practical calibration of AES energy scale.

抄録

A practical and simple calibration procedure for determining the energy scale in Auger electron spectroscopy (AES) by using a newly developed idea of a spectrometer offset function is proposed here. This method enables transformation of the uncalibrated energy scale to be the calibrated and Fermi-level-referenced ones. The reliability of the calibrated energy scale can be estimated by the standard error of least-square fitting of the spectrometer offset function to the experimental values. A round-robin test involving the different kinds of twelve spectrometers has been conducted to clarify the effectiveness of this calibration method. Compared with the Fermi-level-referenced kinetic energies of Ni L₃VV and M₃VV, the scatter of these calibration-corrected peak positions is found to be very low, amounting to 20∼30% of the scatter of uncorrected values. It is also found that the spectrometers with the higher energy resolution tend to have the lower standard errors. These results clearly suggest that this procedure is very useful for the practical calibration of AES energy scale.

責任著者(Corresponding author)

訂正情報

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