1994 年 15 巻 5 号 p. 282-287
A new type of standard channel electron multiplier (CEM) for quantitative Auger electron spectroscopy has been developed by members of Hardware Subcommittee, VAMAS-SCA-JAPAN. This was designed to provide a function of selfcalibration with dualoperating mode of CEM and Faradaycup. In preliminary AES measurements of a polycrystalline Au sheet by use of the so-called VAMAS-type standard CEM, it was demonstrated that the instrument could be operated well in both CEM and Faradaycup modes. The good agreement of both spectra except in the low kinetic energy region suggested that the energy dependency of the standard CEM was almost flat in the energy range from about 100eV to 2500eV. From these results it could be said that the use of the VAMAStype standard CEM will make the calibration of the intensity scale of AES easier and more practicable.