表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
超高真空走査型電気力顕微鏡
高分解能電気物性情報を得るためのノウハウ
井上 貴仁
著者情報
ジャーナル フリー

1997 年 18 巻 5 号 p. 319-321

詳細
抄録

We have developed an easy-to-use electrostatic force microscope for operation in ultrahigh vacuum (UHV), based on the scanning Maxwell stress microscope (SMM), for application to surface science and nanoelectric devices. The SMM head is built on an UHV-flange with setting all the optical parts in the air side. This design makes operation of our UHV-SMM as convenient as operating an instrument in air. The stable oscillation at very small tip-sample separation without persistent adhesion under UHV opens up the possibility to improve the lateral resolution of the SMM.

著者関連情報
© 社団法人 日本表面科学会
前の記事
feedback
Top