気相合成ダイヤモンドの電子デバイスへの応用

抄録

Chemical vapor deposited diamond films attract a great deal of interest for application to the future electronics. Recent progress in heteroepitaxial growth of diamond films on Si, SiC, or Pt substrates will realize single crystalline diamond substrates of large wafer size. One of most enthusiastic application area of diamond films is the electron emitter for the flat display panel or microvacuum electronics because of its unique property of negative electron affinity surface. An electron emitter of diamond thin film was designed using metal-insulator-semiconductor diode structure. The fabricated emitter performed electron emission only by the forward biasing to the diode.