表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
化合物半導体結晶成長過程とエレクトロンカウンティングモデル
白石 賢二
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ジャーナル フリー

1998 年 19 巻 3 号 p. 154-160

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抄録
GaAs(001) surfaces, on which epitaxial growth is most commonly performed, contain, in general, either missing dimer rows or excess As ad-dimers, and As coverage is not equal to 1.00. We investigated theoretically how the layer-bylayer growth is maintained on GaAs(001) surfaces by controlling the excess and deficiency of surface As atoms. Our calculations indicate that pre-adsorbed Ga atoms act as “self-surfactant atoms”; and induce the As rearrangement on the surface during GaAs epitaxial growth. We show that this effect originates from the energy stabilization due to the charge transfer on the surfaces.
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© 社団法人 日本表面科学会
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