縮小露光リソグラフ用レーザープラズマ軟X線光源装置の開発

抄録

Laser-plasma soft X-rays as a projection X-ray lithograph source are required to be used for more than 8 successive hours. And serious problems are soft X-ray energy stability, damages to optics by debris and successive supply targets. From the measurements of soft X-ray spectra and amount, size and scattering direction of debris from target irradiated with focused laser, we have developed a laser-plasma soft X-ray source system with debris-shield, debris free X-ray filter, tape-target driver and the low debris tape-target of the thin aluminum and polymer films. We demonstrated 8 successive hours generation of soft X-rays with the developed laser-plasma soft X-ray system as a projection X-ray lithograph source. The energy conversion efficiency of the soft X-rays at the wavelength of 13 nm in our system was estimated to be 0.29%.