Surface modification by low-temperature plasma was reviewed. Plasma treatments of powders and fibers (fabrics) were focused, and the literatures published last five years concerning the treatments were introduced and discussed. In the plasma treatment of powders, some good devices for the reactor systems are required for uniform and efficient treatments. Recently, plasma-induced graft polymerization has been applied to powdery materials, which are expected to be used as new dispersing particles in hybrid systems. In the plasma treatment of fibers, many kinds of fibers have been proceeded for different purposes. Recently, high-strength fibers, such as aramid and carbon fibers, are often treated by plasma for the use of fiber-reinforced plastic (FRP). The strength of the FRPs with those plasma-treated fibers has been improved.