エキシマレーザー/エキシマランプを用いたプラスチックの表面改質

抄録

Surface modification of a selective area of plastics was accomplished by using an ArF excimer laser or an excimer lamp. The chemical stability of the plastics is attributed to the presence of C-H, C-F, C-Cl or C=O bonds. Plastic sheets were photochemically modified to be hydrophilic or metallic properties with ultra violet photons and chemical solutions. The chemical solution was sandwiched between the sample surface and a silica glass window. With UV photons, the solutions and sample surfaces were excited. In the case of the hydrophilic modification, the surfaces were dehydrogenated or difluorinated by the H or B atoms which were photodissociated from H₂O or B(OH)₃ aqueous solution, and replaced the photodissociated OH radicals. In the case of the metal deposition on the plastic surfaces, the copper sulfate aqueous solution was used. As a result conductive circuit patterns Cu thin films were deposited on the sample surfaces.