SUS 304, SUS 321ステンレス鋼表面に蒸着したTiC膜の密着性

抄録

When SUS 304 is heated in vacuum the surface is covered with a monolayer of sulfur. In case of SUS 321, however, TiC precipitates on the surface. In this report, the effect of these surface compositions of stainless steels on the adherence of TiC coating films was investigated in order to improve the adherence. TiC was deposited on SUS 304, SUS 321 and preheated SUS 321 by means of an activated reactive evaporation. Adherence of TiC on these steels was evaluated by thermal cycling test. The crack growth behavior in the coated layer showed that TiC films adhered best to preheated SUS 321 and secondly best to SUS 321 and worst to SUS 304. The depth profile showed that adherence depended on the depth of intermediate layer between TiC films and stainless steels. This intermediate layer was the thickest between TiC films and preheated SUS 321. The relaxation mechanism of thermal stress was explained with the thickness of the intermediate layer.