荷電粒子を用いたダイヤモンド状薄膜の形成
1984 年 5 巻 4 号 p. 498-505
詳細
1984 年 5 巻 4 号 p. 498-505
The recent progress in diamondlike carbon films prepared by hydrocarbon ion or plasma gas are described. The typical systems reported are classified into three types such as plasma, ion, and neutral deposition systems and each system is discussed. Next, the physical properties and the crystal structures of these films are discussed in comparison with diamond powder. Finally, the growth process of diamond films in the case of ionized deposition is discussed based on the reported data.
