表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
Atom-probe FIMの原理と応用
桜井 利夫橋詰 富博神保 明子
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ジャーナル フリー

1985 年 6 巻 3 号 p. 222-232

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A newly built focusing-type time-of-flight atom-probe is capable of (1) achieving 100% detection efficiency and (2) performing mass analyses under truly ultra-high vacuum conditions (10-11 Torr). The details of the instrumentation and its performance are presented.
As for its applications into materials science, we discuss the following topics : (1) surface and grain boundary segregation of binary alloys, (2) metal-semiconductor interfaces and (3) metastable phases of Al-Ag alloys.

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