EAPFSによる表面構造解析

蒸着Ti薄膜及びアモルファスTiFe

抄録

We tried to obtain the nearest-neighbour spacing of a titanium thin film and an amorphous TiFe alloy film using EAPFS method.
In the case of the titanium thin film, the values obtained on the basis of Ti-L₁ peak show 2.93±0.08Å for l=0, 1 and 2.58±0.08Å for l=2. Whereas, the values obtained on the basis of Ti-L_{2, 3} peak show 3.19±0.05Å for l=0, 1 and 2.87±0.05Å for l=2, respectively. If we assume that the excitation to l=0, 1 is prominent for Ti-L₁ peak and to l=2 for Ti-L_{2, 3} peak, these values are in good agreement with the bulk ones (2.91Å).
By using the same procedure to fine structure of amorphous TiFe alloy film, we can obtain the nearest-neighbor 2.58±0.06Å and 2.44±0.06Å for Ti-L₁ peak and 2.57±0.05Å for Ti-L_{2, 3} peak, respectively.