1988 年 9 巻 6 号 p. 440-445
Gas liberation from electron-bombarded electrode surface during prebreakdown situation is one of important factors that cause electrical breakdown in a vacuum gap. Changes in residual gas components were monitored with a quadrupole mass specrometer, and electron-bombarded electrode surfaces were analyzed with an X-ray photoelectron spectrometer. The ions formed in the prebreakdown gap were also analyzed by a time of flight mass spectrometer installed in a prebreakdown measurement apparatus. It was found that the residual gas components in the prebreakdown situation are H, H2, H2O, CO, and CO2, and the mass numbers of the carriers formed in the vacuum gap were the same as those of the residual gas components. The reaction of the electron bombarded surface and the effect of the reaction on vacuum breakdown phenomena are also discussed.