107 レーザ加熱固体表面温度に与える膜厚の影響

抄録

A opto-microengine is composed of a vacuum chamber, a micro-rotor, and optical beam generation devices such as a laser beam generator and a floodlight lamp. The optical beam generation devices with a visible light are used as an energy supplier. The opto-microengine is rotated by the molecular gas dynamics effects. The effects are caused by the temperature difference between the backward surface and the forward surface of the rotor. With the increase of the temperature difference, the torque of rotation increases. To increase the torque of rotation, it is important to make the selective optical absorber-plates to absorb more laser light. The selective optical absorber-plates are made of an aluminium plate deposited thin films. To determine an ideal film thickness, the influence of the film thickness on the temperature increase of the surface by the laser heating is experimentally clarified. According to the experiment data, the thin film of 800Å silicon oxide and 300 Å germanium in thickness is effective for heating by laser irradiation.