2002 年 22 巻 1Supplement 号 p. 171-172
Scanning Thermal Microscope takes topographic and thermal images with sub-micron spatial resolution. A real temperature measurement method on the SThM has been developed by using a thermal feedback system, where a cantilever is kept same temperature as sample by generating heat proportional to heat flow along it. The micro-fabricated cantilever having thermopile, heater and thermocouple showed good performance of temperature accuracy of below ±1K, contact size of less than 30nm, and thermal response of 50Hz. It is also demonstrated that the system takes qualitative thermal images by a passive operation and quantitative temperature images by the active operation regardless of variations in the contact condition and thermal properties.