This paper reviewed the vacuum characteristic of titanium materials and applications to an UHV system of the current research and development. It has been found that the outgassing rate of the titanium material is very low compared with an existing material such as a stainless steel or an aluminum alloy, and the UHV system made of the titanium material has very high vacuum performance, e.g., very quick pumping and the achievement of UHV/XHV pressure under the simple pre-baking condition.
