真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
解説
keV 領域多価イオンナノビーム生成とその応用
池田 時浩岩井 良夫金井 保之小島 隆夫根引 拓也成沢 忠山崎 泰規
著者情報
ジャーナル フリー

2007 年 50 巻 9 号 p. 569-573

詳細
抄録

  We have developed a method to produce a micro- or nano-sized beam of highly charged ions with a glass capillary. A transmission of 8 keV Ar8+ beam through the capillary 5 cm long with 800/24 μm inlet/outlet inner diameters was observed stably for more than 1200 s. The transmitted beam had approximately the same size as the outlet inner diameter with a beam density enhancement of about 10 and a divergence of ±5 mrad. The initial beam was guided through a capillary tilted by ±87 mrad, and it still kept the incident charge. In order to fabricate the nano-sized outlet of the capillary, a Focused Ion Beam of Ga+ with 40 kV acceleration was employed.

著者関連情報
© 2007 日本真空協会
前の記事 次の記事
feedback
Top