We have developed a method to produce a micro- or nano-sized beam of highly charged ions with a glass capillary. A transmission of 8 keV Ar8+ beam through the capillary 5 cm long with 800/24 μm inlet/outlet inner diameters was observed stably for more than 1200 s. The transmitted beam had approximately the same size as the outlet inner diameter with a beam density enhancement of about 10 and a divergence of ±5 mrad. The initial beam was guided through a capillary tilted by ±87 mrad, and it still kept the incident charge. In order to fabricate the nano-sized outlet of the capillary, a Focused Ion Beam of Ga+ with 40 kV acceleration was employed.