2007 年 50 巻 9 号 p. 574-578
A microscope for hydrogen has been developed by means of micro-beam nuclear reaction analysis. The resonance nuclear reaction between proton and 15N accelerated up to ~6 MeV is used. The micro-beam of 15N ion was made by a glass capillary, which has a taper shape. Against this focused 15N ion beam, samples are scanned perpendicularly to the beam direction by stepping motors. As an application of the microscope, a patterned Y thin film covered by Pd thin film was prepared, and the sample was exposed to 1 atm hydrogen atmosphere over a night. The hydrogen distribution in this sample was investigated by using a glass capillary, which has an exit with the 50 μm diameter. As a result, a profile of nuclear reaction analysis, indicating that the hydrogen atoms are concentrated in the patterned Y thin films, was taken.