真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
研究
水素観察のためのマイクロ・ビーム核反応法装置の開発と応用
関場 大一郎米村 博樹根引 拓也小倉 正平ヴィルデ マーカス松本 益明岡野 達雄笠木 治郎太成沢 忠栗林 志頭真岩村 康弘伊藤 岳彦松崎 浩之福谷 克之
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2007 年 50 巻 9 号 p. 574-578

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  A microscope for hydrogen has been developed by means of micro-beam nuclear reaction analysis. The resonance nuclear reaction between proton and 15N accelerated up to ~6 MeV is used. The micro-beam of 15N ion was made by a glass capillary, which has a taper shape. Against this focused 15N ion beam, samples are scanned perpendicularly to the beam direction by stepping motors. As an application of the microscope, a patterned Y thin film covered by Pd thin film was prepared, and the sample was exposed to 1 atm hydrogen atmosphere over a night. The hydrogen distribution in this sample was investigated by using a glass capillary, which has an exit with the 50 μm diameter. As a result, a profile of nuclear reaction analysis, indicating that the hydrogen atoms are concentrated in the patterned Y thin films, was taken.

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© 2007 日本真空協会
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