外径70 mm のコンフラットフランジにマウントしたミニチュア電子・イオン・軟 X 線検出器の製作

抄録

  We introduce a miniature electron/ion/soft-X-ray detector mounted on a conflat flange with an outer diameter of 70 mm. It consists of an extraction/retarding electrode, microchannel plates, and a conflat flange with an outer diameter of 70 mm. This detector can be used for measurements of electrons, ions, or soft-X-rays generated in the gas phase and those emitted from surfaces.