The growth of Te thin films deposited on thin evaporated films of KBr which were deposited on air-cleaved muscovite mica at residual gas pressures in the about 10-3 Pa range have been studied by transmission electron microscopy and reflection electron diffraction methods. The KBr films on mica at 200-250°C are entirely (111) oriented monocrystals which include some twins. The surfaces of KBr films are not smooth, and consisted of triangle-cone facets, square-plate-like facets and corrugated facet structures. Tellurium deposited on the KBr films has grown with the c-axis parallel to the ‹110› direction on the {100} face of each facets. This mechanism is similar to that of Te deposited on the cleaved KBr (001) surface. The points of intersection of each facets give rise to maximum nucleation densities of Te particles.