抄録
Auger electron spectroscopy of insulator polyimide films has been studied from the viewpoint of discharging effect in order to facilitate surface analysis of contact hole formed by Ar laser beam irradiation. Polyimide surface was found to become conductive by electron bombardment. The conductive layer formation is easily observed by SEM absorption image, and is found to be slightly lack of imide bonding. By means of the conductive layer and evaporated Al pattern, Auger analysis with high energy electron beam and high incident angle was accomplished without charging-up phenomena.
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