Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Preparation of PbTiO3 Films by Sputter Assisted Plasma Chemical Vapor Deposition Method
Shoichi MOCHIZUKISaburo KIMURATadashi ISHIDARyoji MAKABE
Author information
JOURNAL FREE ACCESS

1989 Volume 32 Issue 3 Pages 341-344

Details
Article 1st page
Content from these authors
© The Vacuum Society of Japan
Previous article Next article
feedback
Top